PRODUCT
Inspection and automation systems for diverse industries, powered by core OCT technology
Semiconductor & Electronics
TomoPro Series
A high-speed optical coherence tomography (OCT) system that measures the internal 3D geometry of transparent and multilayer samples without contact. Depending on the configuration, it can be used as a standalone system or mounted as a head on other equipment such as a robot arm. It consists of a sensor head, light-source module, and control/interferometer unit.
- Axial Resolution Minimum 1.9 µm (850 HR)
- Wavelength Options 850 / 1060 / 1310 nm
- Scanning Method 2-axis galvanometer scanner
- Applications Internal inspection of transparent and multilayer structures
Model Specification Comparison
| Item | TomoPro-850 Standard | TomoPro-850 HR | TomoPro-1060 Standard | TomoPro-1310 Standard |
|---|---|---|---|---|
| Center Wavelength | 850 nm | 850 nm | 1060 nm | 1310 nm |
| Bandwidth | 50 nm | 165 nm | 120 nm | 105 nm |
| A-scan Rate | 130 kHz | 130 kHz | 100 kHz | 100 kHz |
| Axial Resolution | 6.4 μm | 1.9 μm | 4.1 μm | 7.2 μm |
| Imaging Depth | 7.4 mm | 1.9 mm | 3.4 mm | 5 mm |
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