X-ray Optical Vision Module

A high-resolution optical vision module that uses X-ray transmission images to detect subsurface defects that cannot be seen externally, including internal defects, bonding conditions, and foreign matter. Its proprietary detection method provides 10 to 50 times higher pixel density than conventional systems, delivering Super Resolution performance for fine-defect detection.

• FOV (4× lens) 10 × 13 mm
• Resolution (4× lens) 0.8 μm/pixel
• Detection Targets Internal defects, bonding conditions, foreign matter
• Applications Semiconductor internal defect inspection